The influence of microelectronic processing steps on the properties of porous Si-layers

Boston, Mass (1993) [Contribution to a book]

Optical properties of low dimensional silicon structures. Hrsg. D.C. Bensahel [u.a.]
Page(s): 75

Authors

Selected Authors

Münder, H.
Berger, M. G.
Frohnhoff, S.
Thönissen, M.
Lüth, H.

Other Authors

Theiss, W.
Küpper, L.

Identifier

  • REPORT NUMBER: RWTH-CONV-103404