Influence of reactive sputtering process parameters on the structure and properties of TiO 2 thin films

Aachen / Publikationsserver der RWTH Aachen University (2011) [Dissertation / PhD Thesis]

Page(s): II, 176 S. : graph. Darst.

Authors

Selected Authors

El-Hamshary, Azza Amin

Identifier

  • URN: urn:nbn:de:hbz:82-opus-38608
  • REPORT NUMBER: RWTH-CONV-143065