The influence of energetic bombardment on the structure formation of sputtered zinc oxide films : development of an atomistic growth model and its application to tailor thin film properties

Aachen / Publikationsserver der RWTH Aachen University (2011) [Dissertation / PhD Thesis]

Page(s): 197 S. : Ill., graph. Darst.

Authors

Selected Authors

Köhl, Dominik

Identifier

  • URN: urn:nbn:de:hbz:82-opus-35985
  • REPORT NUMBER: RWTH-CONV-125632