Process property relations in reactively sputtered transition metal compounds

Aachen / Publikationsserver der RWTH Aachen University (2008) [Dissertation / PhD Thesis]

Page(s): VIII, 192 S. : Ill., graph. Darst.

Authors

Selected Authors

Sarakinos, Konstantinos

Identifier

  • URN: urn:nbn:de:hbz:82-opus-21960
  • REPORT NUMBER: RWTH-CONV-112530