Exploring the potential of serial magnetron co-sputtering

Aachen / Publikationsserver der RWTH Aachen University (2015) [Dissertation / PhD Thesis]

Page(s): VII, 110, XXXIX S. : graph. Darst.

Authors

Selected Authors

Schmidt, Rüdiger Matti

Identifier

  • URN: urn:nbn:de:hbz:82-rwth-2015-024832
  • REPORT NUMBER: RWTH-2015-02483