Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering

Amsterdam / Elsevier, [u.a.] (2014) [Journal Article]

Surface & coatings technology
Volume: 252
Page(s): 74-78

Authors

Selected Authors

Schmidt, Rüdiger Matti
Ries, Patrick
Pflug, Andreas
Wuttig, Matthias
Kubart, Tomas

Identifier