Structure control of sputtered zinc oxide films by utilizing zinc oxide seed layers tailored by ion beam assisted sputtering

Bristol / IOP Publ. [u.a.] (2012) [Journal Article]

Journal of physics / D, Applied physics
Volume: 45
Issue: 24
Page(s): 245302

Authors

Selected Authors

Köhl, Dominik
Natarajan, Gomathi
Wuttig, Matthias

Identifier