Thermal stability of sputtered zirconium oxide films

Kidlington / Elsevier Science (2004) [Journal Article]

Vacuum
Volume: 75
Issue: 1
Page(s): 7-16

Authors

Selected Authors

Venkataraj, S.
Kappertz, O.
Liesch, C.
Detemple, Ralf
Jayavel, R.

Other Authors

Wuttig, Matthias

Identifier