Structure formation upon reactive direct current magnetron sputtering of transition metal oxide films

Melville, NY / AIP (2004) [Journal Article]

Applied physics letters
Volume: 85
Issue: 5
Page(s): 748-750

Authors

Selected Authors

Ngaruiya, J. M.
Kappertz, O.
Mohamed, S. H.
Wuttig, Matthias

Identifier