Effect of the target surface temperature on the distribution of nanoparticles formed by ion implantation

Road Town, Tortola, British Virgin Islands / Pleiades Publ. (2001) [Journal Article]

Technical physics letters
Volume: 27
Issue: 7
Page(s): 554-556

Authors

Selected Authors

Stepanov, Andrey L.
Hole, D.
Popok, V. N.

Identifier