Depth profiles of metal ions implanted in dielectrics at low energies

Moscow / MAIK 'Nauka/Interperiodica' (2001) [Journal Article]

Physics of the solid state
Volume: 43
Issue: 4
Page(s): 766-771

Authors

Selected Authors

Stepanov, Andrey L.
Zhikharev, V. A.
Khaibullin, I. B.

Identifier