Growth and characterization of zirconium oxynitride films prepared by reactive direct current magnetron sputtering

Melville, NY / IOP Publ. (2002) [Journal Article]

Journal of applied physics
Volume: 92
Issue: 5
Page(s): 2461-2466

Authors

Selected Authors

Venkataraj, Selveraj
Kappertz, Oliver
Jayavel, R.
Wuttig, Matthias

Identifier