Influence of Xe+-ion irradiation on the microstructure of diamond-like carbon films

Kidlington / Elsevier Science (2001) [Journal Article]

Vacuum
Volume: 62
Issue: 1
Page(s): 15-19

Authors

Selected Authors

Faizrakhmanov, I. A.
Bazarov, V. V.
Zhikharev, V. A.
Stepanov, Andrey L.
Khaibullin, I. B.

Identifier