Growth of TiOX Films by High Power Pulsed Magnetron Sputtering from a Compound TiO1.8 Target

St. Petersburg / Advanced Study Center (2007) [Contribution to a conference proceedings, Journal Article]

Reviews on advanced materials science : RAMS
Volume: 15
Issue: 1
Page(s): 44-48

Authors

Selected Authors

Sarakinos, K.
Alami, Jones
Klever, Christian
Wuttig, Matthias

Identifier

  • REPORT NUMBER: RWTH-CONV-066231