A semi-quantitative model for the deposition rate in non-reactive high power pulsed magnetron sputtering

Bristol / IOP Publ. (2008) [Journal Article]

Journal of physics / D, Applied physics
Volume: 41
Issue: 21
Page(s): 215301

Authors

Selected Authors

Sarakinos, K.
Alami, Jones
Dukwen, Julia
Wördenweber, Jan
Wuttig, Matthias

Identifier