The role of energetic ion bombardment during growth of TiO2 thin films by reactive sputtering

Bristol / IOP Publ. (2010) [Journal Article]

Journal of physics / D, Applied physics
Volume: 43
Issue: 40
Page(s): 405303

Authors

Selected Authors

Amin, Azza
Köhl, Dominik
Wuttig, Matthias

Identifier