Effect of heat treatment on structural, optical and mechanical properties of sputtered TiOxNy films

Amsterdam [u.a.] / Elsevier (2004) [Journal Article]

Thin solid films
Volume: 468
Issue: 1/2
Page(s): 48-56

Authors

Selected Authors

Mohamed, S. H.
Kappertz, O.
Niemeier, T.
Drese, R.
Wakkad, M. M.

Other Authors

Wuttig, Matthias

Identifier