The effect of target aging on the structure formation of zinc oxide during reactive sputtering

Amsterdam [u.a.] / Elsevier (2007) [Journal Article]

Thin solid films
Volume: 515
Issue: 7/8
Page(s): 3554-3558

Authors

Selected Authors

Severin, Daniel
Kappertz, Oliver
Nyberg, T.
Berg, S.
Wuttig, Matthias

Identifier