Process characteristics and film properties upon growth of TiOx films by high power pulsed magnetron sputtering

Bristol / IOP Publ. (2007) [Journal Article]

Journal of physics / D, Applied physics
Volume: 40
Issue: 7
Page(s): 2108-2114

Authors

Selected Authors

Sarakinos, Kostas
Alami, Jones
Wuttig, Matthias

Identifier