Influence of nitrogen content on properties of direct current sputtered TiOxNy films

Berlin / Wiley-VCH (2004) [Journal Article]

Physica status solidi / A, Applications and materials science
Volume: 201
Issue: 1
Page(s): 90-102

Authors

Selected Authors

Mohamed, S. H.
Kappertz, Oliver
Ngaruiya, J. M.
Niemeier, T.
Drese, Robert Jens

Other Authors

Detemple, Ralf
Wakkad, M. M.
Wuttig, Matthias

Identifier