Reactive direct current magnetron sputtering of tungsten oxide : a correlation between film properties and deposition pressure

Amsterdam [u.a.] / Elsevier (2006) [Journal Article]

Thin solid films
Volume: 515
Issue: 4
Page(s): 2760-2764

Authors

Selected Authors

Salinga, Christian Lothar
Kappertz, Oliver
Wuttig, Matthias

Identifier