Reactive sputter deposition of zinc oxide : employing resputtering effects

Amsterdam [u.a.] / Elsevier (2005) [Journal Article]

Thin solid films
Volume: 484
Issue: 1/2
Page(s): 64-67

Authors

Selected Authors

Kappertz, Oliver
Drese, Robert Jens
Wuttig, Matthias
Ngaruiya, J. M.

Identifier