The role of backscattered energetic atoms in film growth in reactive magnetron sputtering of chromium nitride

Bristol / IOP Publ. (2007) [Journal Article]

Journal of physics / D, Applied physics
Volume: 40
Issue: 3
Page(s): 778-785

Authors

Selected Authors

Sarakinos, Kostas
Alami, Jones
Karimi, Patrick Mwangi
Severin, Daniel
Wuttig, Matthias

Identifier