Structural, optical and mechanical properties of aluminium nitride films prepared by reactive DC magnetron sputterin

Amsterdam [u.a.] / Elsevier (2006) [Contribution to a conference proceedings, Journal Article]

Thin solid films
Volume: 502
Issue: 1/2
Page(s): 235-239

Authors

Selected Authors

Venkataraj, Selveraj
Severin, Daniel
Drese, Robert Jens
Koerfer, Friedel
Wuttig, Matthias

Identifier