Multi-technique characterization of tantalum oxynitride films prepared by reactive direct current magnetron sputtering

Amsterdam [u.a.] / Elsevier (2006) [Journal Article]

Thin solid films
Volume: 514
Issue: 1/2
Page(s): 1-9

Authors

Selected Authors

Venkataraj, Selveraj
Kittur, Harish
Drese, Robert Jens
Wuttig, Matthias

Identifier