Structural and optical properties of thin zirconium oxynitride films prepared by reactive direct current magnetron sputtering

Melville, NY / IOP Publ. (2002) [Journal Article]

Journal of applied physics
Volume: 92
Page(s): 3599-3599

Authors

Selected Authors

Venkataraj, S.
Kappertz, Oliver
Weis, H.
Drese, Robert Jens
Jayavel, R.

Other Authors

Wuttig, Matthias

Identifier

  • REPORT NUMBER: RWTH-CONV-026888