Preparation and characterization of tantalum oxide films produced by reactive DC magnetron sputtering

Berlin / Wiley-VCH (2003) [Journal Article]

Physica status solidi / A, Applications and materials science
Volume: 198
Page(s): 99-99

Authors

Selected Authors

Ngaruiya, James Mbiyu
Venkataraj, S.
Drese, Robert Jens
Kappertz, Oliver
Pedersen, Tom Peder Leervad

Other Authors

Wuttig, Matthias

Identifier