Defect formation upon reactive DC magnetron sputtering of GeO2 films

New York, NY / American Institute of Physics (2000) [Journal Article]

Journal of vacuum science & technology / A, Vacuum, surfaces, & films
Volume: 18
Page(s): 42-42

Authors

Selected Authors

Njoroge, Walter Kamande
Lange, Thomas
Weis, Hansjörg
Kohnen, Birgit
Wuttig, Matthias

Identifier