Increase of the deposition rate in reactive sputtering of metal oxides usinga ceramic nitride target

Melville, NY / AIP (2009) [Journal Article]

Journal of applied physics
Volume: 105
Issue: 9
Page(s): 093302

Authors

Selected Authors

Severin, Daniel
Kappertz, Oliver
Nyberg, T.
Berg, S.
Pflug, Andreas

Other Authors

Wuttig, Matthias

Identifier