Tailoring of structure formation and phase composition in reactively sputtered zirconium oxide films using nitrogen as an additional reactive gas

Melville, NY / AIP (2008) [Journal Article]

Journal of applied physics
Volume: 103
Issue: 8
Page(s): 083306

Authors

Selected Authors

Severin, Daniel
Sarakinos, Kostas
Kappertz, Oliver
Pflug, Andreas
Wuttig, Matthias

Identifier