Growth of (Ba, Sr)TiO3 thin films in a multi-wafer MOCVD reactor

New York, NY [u.a.] / Materials Research Society (2001) [Contribution to a conference proceedings]

Ferroelectric thin films IX : symposium held November 26 - 30, 2000, Boston, Massachusetts, U.S.A. / ed.: Paul C. McIntyre ...
Page(s): CC9.4, 6 S.

Authors

Selected Authors

Ehrhart, Peter
Fitsilis, F.
Regnery, R.
Jia, C.
Waser, R.

Other Authors

Schienle, F.
Schumacher, M.
Dauelsberg, M.
Strzyzewske, P.
Jürgensen, H.

Identifier

  • REPORT NUMBER: RWTH-CONV-180732